| 摘要 |
A device and method for the detection of one or more gases is disclosed. A MEMS structure comprising a micro gas cell array is provided comprising one or more micro gas cells having a predetermined gas therein. The micro gas cells define an optical path therethrough and may comprise a micro lens. Electromagnetic energy from a scene is collected and passed through one or more micro gas cells whereby electromagnetic energy emitted or reflected from a gas of interest in a scene is absorbed by a substantially identical gas contained within a micro gas cell. In this manner, the micro gas cell acts as a spectral filter. The electromagnetic outputs of the micro gas cells, which may comprise one or more spectrally inert micro gas cells, are received by one or more detector elements such as a photon detector array. The ratio of the outputs of the related detector elements are computed by processing electronics, resulting in the identification of the gas of interest. |
