| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a laser processing device capable of easily changing the number of laser beams irradiated to a processing object. <P>SOLUTION: In the laser processing device, a laser beam irradiation means includes a laser beam generation means for generating the laser beams 69, a condensing lens for irradiating the laser beams to the processing object by condensing the laser beams generated by the laser beam generation means, and a laser beam divergence means 74 arranged on an optical path between the laser beam generation means and the condensing lens and making the laser beams generated by the laser beam generation means diverge into a plurality of laser beams. The laser beam divergence means includes a diffractive optical elements 82a to 82g in which the number of divergence for diverging the laser beams are different each other, and a positioning means for selectively positioning one of the plurality of diffractive optical elements on an optical path of laser beams. <P>COPYRIGHT: (C)2012,JPO&INPIT |
