| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a transparent conductive laminate having flexibility and high transmittance, wherein the laminate is formed by laminating transparent conductive films using the same material, and to provide a method for producing the same. <P>SOLUTION: The transparent conductive laminate is formed by laminating an amorphous first transparent conductive film and a crystalline second transparent conductive film on at least one surface of a transparent substrate. The first transparent conductive film and the second transparent conductive film are formed using a sputtering target of the same composition. The first transparent conductive film is formed at a hydraulic partial pressure during film formation of 5.0×10<SP POS="POST">-4</SP>Pa or more, and the second transparent conductive film is formed at a hydraulic partial pressure during film formation of less than 5.0×10<SP POS="POST">-4</SP>Pa. <P>COPYRIGHT: (C)2012,JPO&INPIT |
