| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a pyroelectric type detector, a pyroelectric type detection device, and an electronic apparatus in which an area is not enlarged even though a wiring connected to a first electrode is formed in a support member, and which are therefore suitable for high integration. <P>SOLUTION: A pyroelectric type detector includes a base substrate 100, a spacer member 104 projecting from the base substrate 100, a support member 210 supported by the spacer member 104, and a pyroelectric type detection element 220 supported by the support member 210. The pyroelectric type detection element has a first electrode 234, a second electrode 236, and a pyroelectric body 232 disposed between the first electrode and the second electrode. The support member includes an insulation layer 212, a first wiring layer 214 disposed on a side closer to a second face 211B with respect to the insulation layer, and a first plug 216 which is through the insulation layer at a location where the pyroelectric body and a first wiring layer overlap with each other in a plan view, and which connects the first wiring layer and the first electrode. <P>COPYRIGHT: (C)2012,JPO&INPIT |
