| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a thermal type detector, a thermal type detection device, and an electronic apparatus in which a spacer member that defines the depth of a cavity portion thermally separating a thermal type detection element from a base substrate is used for a wiring structure as well, and the wiring structure enables the securing of the depth of a cavity portion which allows a secure thermal separation. <P>SOLUTION: A thermal type detector includes a base substrate 100, a spacer member 104 projecting from the base substrate 100, a support member 210 supported by the spacer member 104, a thermal type detection element 220 supported by the support member, detection circuits 510, 520 disposed in the base substrate and connected to the thermal type detection element, and a wiring portion connecting the thermal type detection element and the detection circuits. The wiring portion includes at least one layer of a first conductive layer LIA, LIB disposed in the base substrate, at least one layer of a second conductive layer LIC, LID disposed in the spacer member, third conductive layers 214, 238 supported by the support member, and a plurality of plugs HLA-HLD connecting the first, second, and third conductive layers to the respective adjacent layers. <P>COPYRIGHT: (C)2012,JPO&INPIT |
