| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a film suction device capable easily separating a film. <P>SOLUTION: This film suction device 1 sucks the upper surface of a film A. The film suction device 1 includes: a vacuum chuck 10 including a plurality of pressure chambers 12 in the longitudinal direction, and including a suction surface 10a communicating with the plurality of pressure chambers 12 independently of one another, and bulging between both ends in the longitudinal direction; and a hand device for sequentially bringing the suction surface 10a into contact with the upper surface of the film A from one end to the other end out of both the ends in the longitudinal direction. <P>COPYRIGHT: (C)2012,JPO&INPIT |
