摘要 |
<P>PROBLEM TO BE SOLVED: To provide a thin film solar cell improved in light efficiency and a method of manufacturing the thin film solar cell. <P>SOLUTION: In a first cell of a thin film solar cell, a first amorphous intrinsic semiconductor film 133 with a continuously graded hydrogen content is inserted between a first n-type impurity semiconductor film 135 and a first p-type impurity semiconductor film 131. The hydrogen content of the first amorphous intrinsic semiconductor film 133 decreases in a continuous manner from a first interface 133a with the first p-type impurity semiconductor film 131 arranged on a light incident side toward a second interface 133b with the first n-type impurity semiconductor film 135 arranged on a side opposite to the light incident side. <P>COPYRIGHT: (C)2012,JPO&INPIT |