| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a coated substrate with an antireflection layer having improved abrasion resistance, and to provide a coating method for the coated substrate. <P>SOLUTION: The coated substrate has a multi-layer antireflection coating 5 composed of a plurality of layers with different refractive indices on at least one surface, wherein layers 51, 53 each having a higher refractive index and layers 52, 54 each having a lower refractive index are alternated. The layers 52, 54 each having a lower refractive index are made of silicon oxide having an aluminum content. The ratio of amount of aluminum to silicon is greater than 0.05, preferably greater than 0.08. The amount of silicon predominates with respect to the amount of aluminum. The layers 51, 53 each having a higher refractive index contain a silicide, oxide or nitride. <P>COPYRIGHT: (C)2012,JPO&INPIT |
