| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide composite exposure equipment capable of exposing by efficiently supplying light from one light source for exposure to a plurality of exposure processing blocks, and by accurately connecting a plurality of patterns with each other on one processing substrate. <P>SOLUTION: Composite exposure equipment includes, in each of exposure processing blocks, an exposure block controller, an exposure stage driving mechanism, and a mask stage controlling mechanism. The exposure block controller executes alignment processing for aligning a substrate to be processed at a position of a photomask by controlling the exposure stage driving mechanism and the mask stage controlling mechanism. A whole exposure processing controller moves an exposure stage step by step to a plurality of positions and executes the alignment processing, while sequentially switching exposure light from the light source for exposure to expose the substrate to be processed in each of the exposure processing blocks. <P>COPYRIGHT: (C)2012,JPO&INPIT |
