METHOD FOR MANUFACTURING TRANSPARENT CONDUCTIVE FILM, AND TRANSPARENT CONDUCTIVE FILM

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a transparent conductive film having excellent crystallinity and low specific resistance without suffering from an energy loss due to a substrate heating method when making a ZnO-based film as an ITO substitutive material.

SOLUTION: The method for manufacturing the transparent conductive film includes: a polycrystalline film-forming step of forming a polycrystalline film, which contains zinc oxide, on a substrate by a vapor-phase deposition method; and a transparent conductive film-forming step of forming the transparent conductive film, in which the polycrystalline film is crystal-grown with Joule heating caused by energizing the polycrystalline film.

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