| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for certainly forming an amorphous carbon film and the like on a transparent resin base material. <P>SOLUTION: In the method, a source gas Go containing a hydrocarbon-based gas is supplied between a holding electrode 1 and an applying electrode 2, which are arranged facing each other; AC voltage is applied on the applying electrode 2 while generating, if necessary, DC bias voltage between the holding electrode 1 and the applying electrode 2 under an atmospheric pressure atmosphere; a glow discharge plasma is generated between a base material W held by the holding electrode 1 and the applying electrode 2; and thus, an amorphous carbon film and the like are formed on the surface of the base material W. The base material W is a transparent resin, and the film is formed in the range of temperature lower than a thermal deformation temperature of the base material W. <P>COPYRIGHT: (C)2012,JPO&INPIT |
