| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a wavelength variable interference filter capable of accurately setting the gap between reflection films. <P>SOLUTION: A wavelength variable interference filter 5 includes: a first substrate 51; a second substrate 52; a first reflection film 56; a second reflection film 57 provided for a movable part 521 and facing the first reflection film 56 via an optical gap; a first electrode part 541 provided for the first substrate 51; and a second electrode 542 facing the first electrode part 541 via an inter-electrode gap. The first electrode part 541 includes: a first electrode 5411; an insulation layer 5412 covering a surface of the first electrode 5411 that faces the second substrate 52; and a conductive member 5413 covering a surface of the insulation layer 5412 that faces the second substrate 52, facing the second electrode 542 via the inter-electrode gap, and insulated from the first electrode 5411. <P>COPYRIGHT: (C)2012,JPO&INPIT |
