| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve operation efficiency related to maintenance by facilitating the detachment of an inner container from an outer container and further to enhance the measurement accuracy of the temperature of a vapor deposition material. <P>SOLUTION: The vapor deposition container 1A includes the outer container 10 and the inner container 20 disposed inside the outer container 10, each of the containers being formed of a ceramic material. An outer peripheral bottom surface 20b of the inside container 20 is close contacted to an inner peripheral bottom surface 10a of the outer container 10 while forming a gap S between an inner peripheral side surface 10d of the outer container 10 and an outer peripheral side surface 20a of the inner container 20. The vapor deposition device T1 is provided with the vapor deposition container 1A. <P>COPYRIGHT: (C)2012,JPO&INPIT |
