| 摘要 |
<P>PROBLEM TO BE SOLVED: To accurately position a substrate relative to a retention unit. <P>SOLUTION: A positioning device is configured to enable positioning of the substrate with predetermined position relationship relative to the substrate retention unit when the substrate is retained by the substrate retention unit. The positioning device includes: a pair of link mechanisms 21a, 21b for connecting respective pairs of arms 31a, 31b, which are attached to the substrate retention unit in a state of fixed position relationship between each base end portion 32 and the substrate retention unit, with mutual rotatable connection between respective base end portions 32; and with mutual rotatable connection between respective top end portions 42, a pair of connection units 41a, 41b for connecting between the respective arms 31a, 31b by rotatable connection of each base end portion 45 to each middle portion 35 of the arms 31a, 31b. The positioning device further includes a drive mechanism 23 for varying a clearance between each top portion 42 of the connection units 41a, 41b and each base portion 32 of the arms 31a, 31b, to expand or reduce a distance between top portions 37 of the arms 31a, 31b. <P>COPYRIGHT: (C)2012,JPO&INPIT |
