摘要 |
<P>PROBLEM TO BE SOLVED: To provide a production technique by which a uniform large-area graphene film is formed. <P>SOLUTION: A graphene film 5 is produced by annealing a substrate 1 composed of a predetermined base material 2, a carbon-containing layer 3 formed on the base material, and a carbon compound layer 4 formed on the carbon-containing layer. <P>COPYRIGHT: (C)2012,JPO&INPIT |