| 摘要 |
<P>PROBLEM TO BE SOLVED: To give fluorine by using spare NF<SB POS="POST">3</SB>to overcome a difficulty of using a fluorine cell, by a safety and continuous method observing regulations. <P>SOLUTION: A method for cleaning a reaction chamber comprises the following steps of: (a) giving a reaction chamber for depositing a material on a target substrate; (b) depositing the material on the target substrate in the inner part of the reaction chamber; (c) periodically interrupting the deposition operation; (d) cleaning the inner part of the reaction chamber by making the inner part of the reaction chamber contact with a mixture of fluorine and nitrogen; and (e) when the mixture of fluorine and nitrogen cannot be used, making the inner part of the reaction chamber contact with nitrogen trifluoride by switching the mixture to nitrogen trifluoride. <P>COPYRIGHT: (C)2012,JPO&INPIT |
