发明名称 HEATING DEVICE AND PRODUCTION METHOD FOR MOUNTED BODY
摘要 <p>To improve the tact time of a heating apparatus, provided is a heating apparatus comprising a first pressing member that heats a heating target; a second pressing member that includes an elastic body, and sandwiches the heating target between the first pressing member and the elastic body; and a floating jig that thermally separates the first pressing member from the heating target, holds the heating target between the first pressing member and the second pressing member, and when one of the first pressing member and the second pressing member presses the heating target toward the other of the first pressing member and the second pressing member, thermally connects the heating target and the first pressing member.</p>
申请公布号 KR20120099495(A) 申请公布日期 2012.09.10
申请号 KR20127018830 申请日期 2011.01.11
申请人 SONY CHEMICAL & INFORMATION DEVICE CORPORATION 发明人 MATSUMURA TAKASHI
分类号 H01L21/60;H05K3/32 主分类号 H01L21/60
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