| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method for electromechanical conversion element such that when an orientation control film is formed, the orientation control film is formed not over the entire surface, but by patterning only a necessary part, and can be made thin. <P>SOLUTION: There is provided the manufacturing method for electromechanical conversion element in which an electromechanical conversion element 40 formed by stacking a first electrode 41, an orientation control layer 42, an electromechanical conversion element 43, and a second electrode 44 is manufactured. In an orientation control layer forming process of forming the orientation control layer 42 on a surface side of the first electrode 41, the orientation control layer 42 is formed on the first electrode 41 by a sol-gel method in which a nozzle of a liquid discharge head is opposed to the surface side of the first electrode 41 and an orientation control layer precursor solution consisting of sol is discharged to coat the first electrode 41 with the orientation control layer precursor solution, and the orientation control layer precursor solution is heat-treated to be crystallized on the first electrode 41. <P>COPYRIGHT: (C)2012,JPO&INPIT |
