| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a spectral module capable of preventing the changes of spectral characteristics, while decreasing size. <P>SOLUTION: A spectral module 1 comprises a package body 2, a package cover 7 and a supporting substrate 11, a transmission type grating element 13, a mirror element 20, and an optical detection element 15. On the body 2, a cavity 3 is formed. The cover 7 and the substrate 11 are attached to the body 2 so as to oppose a bottom surface 3b of the cavity 3, and light L is made to pass through into the cavity 3 from the outside of the cavity 3. The grating element 13 is supported by the substrate 11, and splits the light L incident from the outside of the cavity 3 and transmits such to the bottom surface 3b of the cavity 3. The mirror element 20 is disposed on the bottom surface 3b of the cavity 3, and reflects the light L split by the grating element 13. The optical detection element 15 is supported by the substrate 11, and detects the light L reflected by the mirror element 20. <P>COPYRIGHT: (C)2012,JPO&INPIT |
