发明名称 SENSOR
摘要 <P>PROBLEM TO BE SOLVED: To improve sensitivity and detection accuracy and to reduce size. <P>SOLUTION: A sensor 10 includes: a surface acoustic wave element 11 having a plate-shaped substrate 21, a support part 22 which supports the end part of the substrate 21 in a cantilever state, and an interdigital electrode 23 which excites a surface acoustic wave propagating on a surface 21A of the substrate 21, receives the surface acoustic wave propagating on the surface 21A and outputs a reception result signal; a propagation characteristic detection part 15 which detects propagation characteristics of the surface acoustic wave based on a signal outputted from the interdigital electrode 23; and a state quantity detection part 16 which detects the temperature in response to the propagation characteristics detected by the propagation characteristic detection part 15. At least a part of a rear surface 21B of the substrate 21 is covered with a coating layer 25 having a thermal expansion coefficient different from the substrate 21. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012173012(A) 申请公布日期 2012.09.10
申请号 JP20110032460 申请日期 2011.02.17
申请人 SEIKO INSTRUMENTS INC 发明人 ARAOGI MASATAKA
分类号 G01K7/32 主分类号 G01K7/32
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