摘要 |
<P>PROBLEM TO BE SOLVED: To improve sensitivity and detection accuracy and to reduce size. <P>SOLUTION: A sensor 10 includes: a surface acoustic wave element 11 having a plate-shaped substrate 21, a support part 22 which supports the end part of the substrate 21 in a cantilever state, and an interdigital electrode 23 which excites a surface acoustic wave propagating on a surface 21A of the substrate 21, receives the surface acoustic wave propagating on the surface 21A and outputs a reception result signal; a propagation characteristic detection part 15 which detects propagation characteristics of the surface acoustic wave based on a signal outputted from the interdigital electrode 23; and a state quantity detection part 16 which detects the temperature in response to the propagation characteristics detected by the propagation characteristic detection part 15. At least a part of a rear surface 21B of the substrate 21 is covered with a coating layer 25 having a thermal expansion coefficient different from the substrate 21. <P>COPYRIGHT: (C)2012,JPO&INPIT |