| 摘要 |
<P>PROBLEM TO BE SOLVED: To solve a problem wherein there is a case where an ionic liquid decomposes when the ionic liquid is slid in the vacuum device under severe conditions and its decomposition product causes the inside of the vacuum device to be contaminated. <P>SOLUTION: A lubricating oil used in a driving mechanism disposed in a vacuum chamber surrounding a sample includes a hydrophobic anion and a hydrophobic cation. For the hydrophobic anion, an anion (e.g., [N(CF<SB POS="POST">3</SB>SO<SB POS="POST">2</SB>)<SB POS="POST">2</SB>]-) which has moderate viscosity and does not have a weak bond such as a C-C bond is used to avoid the release of impurities. <P>COPYRIGHT: (C)2012,JPO&INPIT |
