发明名称
摘要 The invention relates to an image-processing method for analyzing defects in an integrated electronic circuit (24) using acquisition data from measuring isolated photons emitted by the circuit (24), including a first step of filtering the detected photons (208) using weights corresponding to a space and/or time correlation step (206) and allocated to each respective photon. The processing method further includes at least one basic step (716) of arranging the photons located in a window (Fev(k)) in groups about a predetermined central photon (k) in an event (ev(k)) characterized by an event position and an event weight Wev(k) equal to the sum of the weights of all the photons contained in the window Fev(k).
申请公布号 JP2012521028(A) 申请公布日期 2012.09.10
申请号 JP20120500295 申请日期 2010.03.15
申请人 发明人
分类号 G06T1/00;G01B11/00 主分类号 G06T1/00
代理机构 代理人
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