发明名称 TRANSFER METHOD FOR WORKPIECE AND WORKPIECE PROCESSING APPARATUS
摘要 <P>PROBLEM TO BE SOLVED: To provide a transfer method for workpiece which suppresses the state in which the productivity hits the peak even when processing times of various processes are shortened. <P>SOLUTION: The transfer method for workpiece includes the processes of: extending and contracting a first transfer arm to make a first pick 35a receive a workpiece (a), having been processed, which is stored in a processing chamber 32a; swiveling first and second transfer arms to move a second pick 35b holding a workpiece (1) to be processed to a delivery position set before the processing chamber 32a and also to move the first pick 35a holding the workpiece (a) having been processed to a position adjoining the delivery position set before a load lock chamber 41b; extending and contracting the second transfer arm to store the workpiece (1) to be processed which is held by the second pick 35b in the processing chamber 32a; and swiveling the second transfer arm to move the second pick 35b which holds no workpiece to the delivery position set before the load lock chamber 41b. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012174716(A) 申请公布日期 2012.09.10
申请号 JP20110032081 申请日期 2011.02.17
申请人 TOKYO ELECTRON LTD 发明人
分类号 H01L21/677;H01L21/205;H01L21/3065 主分类号 H01L21/677
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