| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a heat radiation material which overcomes disadvantages of inorganic based materials such as ceramic substrates and diamond substrates, which are high hardness and low processability, and a disadvantage of carbonaceous materials such as graphite films and carbon nano-tubes, which is low heat radiation. <P>SOLUTION: A surface of a graphite substrate is processed to form a nano-meter order irregular structure (Step 301). Further, a surface protection layer is formed on the surface (Step 302). <P>COPYRIGHT: (C)2012,JPO&INPIT |
