| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an acoustic sensor that can improve an S/N ratio of a sensor without disturbing the sensor to be downsized. <P>SOLUTION: A diaphragm 43 is formed as a movable electrode board on a top face of a silicon substrate 42. A diaphragm 43 in a rectangular shape has four corners and center parts on its long sides supported by anchors 46. On a line D connecting the anchors 46 on the center parts on the long sides, the diaphragm 43 has a minimum deviation. On both sides of the line D, there are deviation maximum points G whose deviations are the maximum, and the line D is extended to the cross direction against a direction to connect the deviation maximum points G. <P>COPYRIGHT: (C)2012,JPO&INPIT |
