| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an inkjet head that can suppress deterioration of a piezoelectric material due to moisture in the atmospheric air, and can be miniaturized by densification. <P>SOLUTION: In the inkjet head 100, on a vibrating plate 112a on which a piezoelectric element 120 is formed, a first insulating film 131 having a first opening 131a, and a second insulating film 132 having a second opening 132a are laminated in order. A first wiring is led out from an individual electrode 123 through the first opening and the second opening. On the first wiring, a third insulating film 133, in which a third opening 133a is formed, is formed. A second wiring 150 which electrically connects the first wiring 140 and a driving circuit is led out through the third opening. The third insulating film is not formed in a region excepting the region including the first wiring on a liquid chamber. The film thickness of the region of the second insulating film where the third insulating film is not formed is 5 to 40 nm. The film thickness of the region of the second insulating film where the third insulating film is formed is 100 nm or higher. <P>COPYRIGHT: (C)2012,JPO&INPIT |
