发明名称 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a semiconductor device that can stably reduce harmonic distortion without injecting an impurity into a silicon layer or a silicon substrate for compensation doping. <P>SOLUTION: A first insulating layer 20 is formed on a silicon substrate 10 and contacts the silicon substrate 10. Wiring lines 40 are formed on the first insulating layer 20. The impurity concentration of the silicon substrate 10 under the first insulating layer 20 is 2.0&times;10<SP POS="POST">14</SP>cm<SP POS="POST">-3</SP>or less. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012174884(A) 申请公布日期 2012.09.10
申请号 JP20110035467 申请日期 2011.02.22
申请人 RENESAS ELECTRONICS CORP 发明人
分类号 H01L23/532;H01L21/02;H01L21/76;H01L21/768;H01L23/52;H01L27/08;H01L27/12 主分类号 H01L23/532
代理机构 代理人
主权项
地址