DEVICE FOR CONTROL OF PRODUCTIVITY OF NANOELECTRONIC STRUCTURE FORMATION

摘要

A device for control of productivity of nanoelectronic structure formation comprises a parameter control unit, which input is an input of the device and an output is connected to an input of probe scanning unit. An output of probe scanning unit is connected to an input of probe deviation registration, which input-output is connected to the input-output of parameter control unit. The device contains a control unit of the probe scanning, which input-output is connected to the probe scanning unit input. The second output of control unit of probe scanning is the device output.