| 摘要 |
A method to control the process of baking wafers in a conveyer-type furnace, which comprises measuring the baking temperature and regulating thereof by means of changing fuel consumption per burners in a baking chamber, correcting the baking temperature by the colour of the surface of ready wafer sheets at the outcome of an automatic machine, comparing this colour with the colour accepted as a reference and corresponding correction of setting up the temperature in the baking area, which is distinguished by the fact that for forecasting the effect of changing in setting up the temperature on the colour of the ready wafer sheets in an interval of time of delay, setting up the colour while changing setting up the temperature. Transfer function of this forecasting correction corresponds to a Smith’s preventer. |
