| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an optical semiconductor device that can efficiently improve heat-insulating properties of an optical waveguide layer and to provide a method of manufacturing the same. <P>SOLUTION: A method of manufacturing an optical semiconductor device comprises the steps of: forming a semiconductor intermediate layer on a semiconductor substrate; forming a semiconductor stack including an optical waveguide layer above the semiconductor intermediate layer; forming trenches for exposing the semiconductor intermediate layer on their inner surfaces in the semiconductor stack; and forming a cavity by removing the semiconductor intermediate layer exposed on the inner surfaces of the trenches by using selective wet etching. <P>COPYRIGHT: (C)2012,JPO&INPIT |
