CARBON-CONTENT-PERCENTAGE ACQUISITION DEVICE AND CARBON-CONTENT-PERCENTAGE ACQUISITION METHOD

摘要

In this carbon-content-percentage acquisition device (1), reference information that associates sets of values for prescribed parameters with carbon content percentages is generated and stored in advance. A silicon-carbide film formed on a glass substrate (9) is measured by a spectroscopic ellipsometer (3), yielding a measured spectrum, and a computer (6) uses said spectrum to obtain values for the aforementioned parameters. Said parameter values are then used together with the reference information to obtain the percentage of carbon in the silicon-carbide film with high precision.