ELECTRODE SUBSTRATE AND DISPLAY DEVICE AND TOUCH PANEL COMPRISING SAME

摘要

A drive substrate comprising: an insulating substrate (10); an internal connection terminal (12b) made of ITO or IZO, the connecting terminal being provided on the substrate (10); and a lead wire (14) having one end overlaid on the connection terminal (12b) and another end drawn to an outer edge side of the insulating substrate (10), wherein a contact part of the lead wire (14) where contact is made with the internal connection terminal (12b) is configured using a barrier metal layer (15A) comprising titanium nitride (TiN), a nitrogen concentration thereof being 35 to 65 atoms/cm2 inclusive.