发明名称 ELECTRODE SECURING PLATENS AND ELECTRODE POLISHING ASSEMBLIES INCORPORATING THE SAME
摘要 In one embodiment, an electrode polishing assembly may include an electrode securing platen, a plurality of electrode locating fasteners, and an electrode. Each of the electrode locating fasteners may include an electrode spacing shoulder, a variance cancelling shoulder extending from the electrode spacing shoulder, a threaded platen clamping portion extending from the variance cancelling shoulder, and a threaded nut that engages the threaded platen clamping portion. The electrode locating fasteners clamp the electrode securing platen between the threaded nut and the electrode spacing shoulder. The variance cancelling shoulder is at least partially within one of a plurality of variance cancelling passages of the electrode securing platen. A minimum position stack-up is equal to a minimum passage size minus a maximum shoulder size. A maximum position stack-up is equal to a maximum passage size minus a minimum shoulder size. The maximum position stack-up is greater than the minimum position stack-up.
申请公布号 WO2012061362(A3) 申请公布日期 2012.09.07
申请号 WO2011US58745 申请日期 2011.11.01
申请人 LAM RESEARCH CORPORATION;LA CROIX, CLIFF;AVOYAN, ARMEN;OUTKA, DUANE;ZHOU, CATHERINE;SHIH, HONG 发明人 LA CROIX, CLIFF;AVOYAN, ARMEN;OUTKA, DUANE;ZHOU, CATHERINE;SHIH, HONG
分类号 H01L21/304 主分类号 H01L21/304
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