DEVICE FOR MEASURING TEMPERATURE DISTRIBUTION

摘要

The present invention pertains to a device for measuring a temperature distribution, which can measure a temperature distribution without contacting a sample having a three-dimensional structure. More specifically, the device for measuring the temperature distribution can measure a three-dimensional temperature distribution for the sample, wherein the temperature distribution in the depth direction (direction z) of the sample is measured by a heat reflection method using a chromatic dispersion lens, a diffraction spectrometer and an optical detection array; and the temperature distribution in the parallel directions (direction x-y axes) of the sample is measured by the heat reflection method using a two-axes scanning mirror.