发明名称 METHOD AND APPARATUS FOR TEXTURING A SHEET WAFER
摘要 <p>A method of texturing a sheet wafer 1) provides a sheet wafer having a front surface with a preliminary average surface roughness, and a back surface, and then 2) positions the sheet wafer on a transport mechanism. The back surface of the sheet wafer is positioned to face downwardly. Next, the method sandblasts the front surface of the sheet wafer as it is supported by the transport mechanism to cause the front surface to have a final average surface roughness. The preliminary average surface roughness is less than the final average surface roughness.</p>
申请公布号 CA2885922(A1) 申请公布日期 2012.09.07
申请号 CA20122885922 申请日期 2012.03.01
申请人 MAX ERA, INC. 发明人 WILLIAMS, BROWN;SHERMAN, STEVEN;RICHARDSON, CHRISTINE
分类号 H01L31/04 主分类号 H01L31/04
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