| 摘要 |
The present invention relates to a plasma particle photographing apparatus comprising: a CCD camera arranged in a plasma chamber to acquire a three-dimensional space distribution of plasma particles in the plasma chamber; and a composite lens which is coupled to a front portion of the CCD camera and which has a diopter lens and at least one convex lens to increase the magnification of the CCD camera. According to the above-described plasma particle photographing apparatus, the composite lens has the diopter lens and at least one convex lens is employed to advantageously increase the magnification of the CCD camera and improve the image resolution. In addition, the plasma particle photographing apparatus of the present invention may collect three-dimensional information on the dust particles generated in the plasma, diagnose whether or not the plasma state is normal using the collected information, and notify the result of the diagnosis. Accordingly, quality of processes and productivity of equipment may be improved, thereby increasing yield rate of devices. |
