发明名称 NON-UNIFORM VACUUM PROFILE DIE ATTACH TIP
摘要 <p>A system is disclosed for separating a semiconductor die from a tape to which the die is affixed during the wafer dicing process. The system includes a pick-up arm for positioning a vacuum tip over a semiconductor die to be removed. The vacuum tip includes a non-uniform array of vacuum holes to grip the semiconductor wafer.</p>
申请公布号 WO2012116482(A1) 申请公布日期 2012.09.07
申请号 WO2011CN71368 申请日期 2011.02.28
申请人 SANDISK SEMICONDUCTOR (SHANGHAI) CO., LTD.;RAI, PRADEEP KUMAR;BOCK, KL;WANG, LI;HUANG, JINXIANG;TAI, EN YONG;WANG, JIANHUA;ONG, KH 发明人 RAI, PRADEEP KUMAR;BOCK, KL;WANG, LI;HUANG, JINXIANG;TAI, EN YONG;WANG, JIANHUA;ONG, KH
分类号 H01L21/68;H01L21/67 主分类号 H01L21/68
代理机构 代理人
主权项
地址