INDIVIDUALLY PACKAGED MAGNETORESISTANCE ANGLE SENSOR

摘要

An individually packaged magnetoresistance angle sensor (20) for use in measuring angles in a magnetic field. The magnetoresistance angle sensor (20) comprises a pair of magnetoresistance sensor films (61, 62), wherein one of the films is arranged at a 180-degree rotation relative to the other. The magnetoresistance sensor films (61, 62) are attached to a standard semiconductor package lead frame to form a single-axis push-pull full-bridge sensor. Each of the magnetoresistance sensor films (61, 62) comprises a pair of magnetoresistance wafers (64). Each magnetoresistance wafer comprises one or multiple GMR or MTJ sensor elements. The one or multiple GMR of MTF sensor elements is composed of a spin valve. The element blocks of the magnetoresistance sensor are bound and connected by means of package leads, and can be packaged into various standard semiconductor package designs or packaged into low-cost semiconductor package designs. Also provided is a dual-axis push-pull full-bridge sensor (20) comprised of two pairs of magnoresistance sensor films (84, 85, 86, 87).