TECHNIQUES FOR PRODUCING THIN FILMS OF SINGLE CRYSTAL DIAMOND

摘要

Techniques for fabricating thin single crystal diamond films from a diamond structure having a top surface including implanting a dose of ions at a predetermined depth below the top surface to form a damage layer, selectively masking the top surface to expose one or more portions of the diamond structure, vertically etching one or more of the exposed portions to the predetermined depth, and exfoliating the unexposed portion to form at least one thin single crystal diamond film.