发明名称 |
METHOD FOR PRODUCING GRAPHENE, GRAPHENE PRODUCED ON SUBSTRATE, AND GRAPHENE ON SUBSTRATE |
摘要 |
A production method for producing graphene on a substrate is provided, etc. The method has a formation step in which a solid solution containing carbon dissolved in a metal is formed by being heated to a solid solution temperature at which the solid solution can be formed, and a solid solution layer (505) composed of the solid solution is formed on a substrate (103). In a removal step, the metal is removed from the solid solution layer (505) while the solid solution is kept heated at the solid solution temperature, thereby causing graphene (102) to grow on the substrate (103). Various alloys can be used in addition to metals composed of a single element as a solvent for forming carbon into a solid solution. Removing the metal from the solid solution layer (505) by feeding an etching gas brings the graphene (102) into contact with the substrate (103). |
申请公布号 |
WO2012118023(A1) |
申请公布日期 |
2012.09.07 |
申请号 |
WO2012JP54810 |
申请日期 |
2012.02.27 |
申请人 |
JAPAN SCIENCE AND TECHNOLOGY AGENCY;NODA SUGURU;TAKANO SOICHIRO |
发明人 |
NODA SUGURU;TAKANO SOICHIRO |
分类号 |
C01B31/02;H01L29/786 |
主分类号 |
C01B31/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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