PREPARATION METHOD OF HIGH DENSITY ZINC OXIDE NANOMETER GRANULES

摘要

This invention relates to a preparation method of high density zinc oxide nanometer granules. In the method, diethyl zinc vapour diluted by inert gas and vapour of hydrogen peroxide aqueous solution are used as precursors, and high density zinc oxide nanometer granules are grown in atom layer deposition equipment in the manner of atom layer deposition. In the method, precursors, i.e., diethyl zinc vapour and vapour of hydrogen peroxide aqueous solution, are introduced into the reaction chamber alternatively in pulse mode, purging with inert gas between the introduction of the two precursors. By this invention, high density zinc oxide nanometer granules are produced by atom layer deposition technology, with the advantages of simple procedure, low cost, and exactly control of the size of nanometer granules. The obtained zinc oxide nanometer granules have average diameter of about 5~25nm, height of 2~10nm, and density of 1.0×1010~1.0×1011cm-2, and can be used as photoelectric conversion material in solar cells.