Heating plate with AlN-hBN composite substrate and manufacturing method of the same,申请号KR20100042552-传众专利搜索

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发明名称	Heating plate with AlN-hBN composite substrate and manufacturing method of the same
摘要
申请公布号	KR101179118(B1)	申请公布日期	2012.09.07
申请号	KR20100042552	申请日期	2010.05.06
申请人		发明人
分类号	C23C18/06;B22F3/14;C23C18/22;C23C18/32	主分类号	C23C18/06
代理机构		代理人
主权项
地址

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