| 摘要 |
<P>PROBLEM TO BE SOLVED: To perform highly accurate shape measurement by stably controlling contact force by using a contact type probe even on a steeply inclined surface nearly vertical. <P>SOLUTION: In a shape measuring method for measuring a surface shape of a target by moving a contact type probe along the surface of the target, inclination of the surface of the target is estimated in accordance with magnitude of a force component of contact force applied to the probe, and when it is determined that the surface is nearly vertical, probe holding means is moved in a direction crossing a direction in which the probe holding means has been moved. <P>COPYRIGHT: (C)2012,JPO&INPIT |
