| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an apparatus and method for flame processing of a ring-shaped quartz glass tool, by which the supply amount is increased by efficiently performing high precision flame processing (surface finishing) by using a plurality of flame tools. <P>SOLUTION: The apparatus for flame processing of a ring-shaped quartz glass tool includes: a workpiece mounting table 24 which is rotatably provided; a ring-shaped quartz glass tool 26 mounted and fixed on the workpiece mounting table; a plurality of pieces of outside gas burners 46 which are installed at an equal interval so as to blow flame to the outer surface side of the glass tool 26; a plurality of pieces of inside gas burners 40 which blow flame to the inner surface side of the glass tool 26 and are installed at an equal interval so as to correspond to the outside gas burners; a gas burner holding means for holding the outside gas burners and the inside gas burners; and a gas burner moving means for vertically moving the gas burner holding means. Thereby, the whole surface of the inner surface and the outer surface of the ring-shaped quartz glass tool 26 is processed with flame by performing flame processing in the horizontal direction in the vertical direction in succession. <P>COPYRIGHT: (C)2012,JPO&INPIT |
