| 摘要 |
<P>PROBLEM TO BE SOLVED: To enable production of a high-concentration ozone gas while reducing production cost in a panel-shaped discharge cell for an ozone generator. <P>SOLUTION: Dielectric materials 130, 130 are arranged between a high-voltage electrode 140 and a low-voltage electrode 120 that combines a cooling plate of the lower voltage side, and a discharge gap 70 is formed. A high-voltage insulation panel 150 is disposed on the backside of the high-voltage electrode 140 to insulate from a cooling plate 160 of the high-voltage side. These plates are fixed by tightening by a tie rod 170. The thickness of the high-voltage insulation panel 150 is made to be 0.5-3.5 times of the total thickness of the dielectric materials 130, 130 arranged between the high-voltage electrode 140 and the low-voltage electrode 120. The thickness of the high-voltage electrode 140 is made to be at least 5 times of the total thickness of the dielectric materials 130, 130. <P>COPYRIGHT: (C)2012,JPO&INPIT |
