| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric device that, when supporting a stress-free type piezoelectric vibrating element on a substrate in a cantilever manner, fixes respective proper portions of both beam portions that are at sufficient distances away from a vibrating substrate and thus interposes the beam portions between a fixing portion and the vibrating substrate, so as to prevent negative influence of support stress generated at the fixing portion on the vibrating substrate. <P>SOLUTION: A piezoelectric substrate includes: a vibrating substrate 11; a support portion 20 that is fixed at a position close to an end of the vibrating substrate 11 and supports the vibrating substrate 11 in a cantilever manner; and a fixing portion 30 that fixes the support portion 20 to a substrate 4. The fixing portion 30 is provided in a second connecting portion 22 and is fixed to the substrate 4 by single point support by a fixing member. First protrusions 50 are provided on a main surface of the substrate 4 that faces respective specified portions of beam portions that are positioned closer to a base end of the vibrating substrate 11 with respect to the fixing portion 30. <P>COPYRIGHT: (C)2012,JPO&INPIT |
