| 摘要 |
<P>PROBLEM TO BE SOLVED: To extract an alignment mark candidate becoming the reference of alignment of an FPD substrate surely, even when an alignment mark and a similar mark are attached to the FPD substrate. <P>SOLUTION: A template identification device 1 comprises: a camera 10 which captures the image of an alignment mark 15 attached to an FPD substrate 30; an operation unit 3 which performs an operation for registering the alignment mark 15 as a template mark being referred for alignment of the alignment mark 15; a control unit 2 which performs registration of the template mark, and matching of the template mark and the alignment mark 15; and a monitor 11 which displays the content of processing performed in the control unit 2. When registering the template mark, the control unit 2 performs matching for an image captured for registration of the template mark or a region set in the image, and then extracts an alignment mark candidate and displays the candidate on the monitor 11. <P>COPYRIGHT: (C)2012,JPO&INPIT |
