| 摘要 |
<P>PROBLEM TO BE SOLVED: To perform miniaturization, to reduce power consumption, and to stably and accurately measure particles. <P>SOLUTION: A particle counter 1 includes: a flow cell 10 which is disposed on a flow route of a sample gas S and has an internal path 11 for making the sample gas internally pass through; an image pickup part 12 for picking up an image of an observation surface 10a formed on an inner surface of the internal path; an irradiation part 13 for radiating a luminous flux L in a parallel light state toward the sample gas passing through the internal path and generating the shade of a particle P on the observation surface on the basis of the presence/absence of the particle P contained in the sample gas; and a measurement part 14 for measuring the particle on the basis of the secular change of a picked-up image picked up in the image pickup part. <P>COPYRIGHT: (C)2012,JPO&INPIT |
