摘要 |
<P>PROBLEM TO BE SOLVED: To provide a solar cell substrate material made of a stainless foil in which peeling of a light absorption layer, i.e. a Cu(In<SB POS="POST">1-X</SB>Ga<SB POS="POST">X</SB>)Se<SB POS="POST">2</SB>coating, is prevented, and to provide a manufacturing method therefor. <P>SOLUTION: A stainless foil containing 7-40 mass% of Cr, having a linear expansion coefficient of 12.0×10<SP POS="POST">-6</SP>/°C at 0-100°C, and a thickness of 20-200 μm is subjected to preliminary heating treatment for removing stress in one kind of atmosphere selected from N<SB POS="POST">2</SB>gas, H<SB POS="POST">2</SB>gas, Ar gas, AX gas and HN gas, or in an atmosphere mixing two or more kinds of gas within a temperature range of 250-1050°C. After forming a back electrode 5 consisting of an Mo layer on the surface of the stainless foil 2 subjected to preliminary heating treatment, or after forming an insulation coating on the surface of the stainless foil 2 and further forming a back electrode 5 consisting of an Mo layer thereon, coating formation heating treatment is performed and a light absorption layer 4 consisting of Cu(In<SB POS="POST">1-X</SB>Ga<SB POS="POST">X</SB>)Se<SB POS="POST">2</SB>is formed on the back electrode 5. <P>COPYRIGHT: (C)2012,JPO&INPIT |