| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of easily manufacturing a thin plate of rare earth-containing oxide ceramics used for a device material requiring reaction resistance, heat resistance, wear resistance, corrosion resistance, plasma resistance and chemical resistance, etc. <P>SOLUTION: In the method of manufacturing a rare earth oxide-containing thermal spraying substrate having a thickness of 5 mm or less, after thermal-spraying the rare earth-containing oxide to a base material with a thickness of 5 mm or less, the thermal-sprayed film is peeled from the base material. According to this invention, by thermal-spraying the rare earth-containing oxide to the base material of a predetermined size, the thin plate of the rare earth-containing oxide ceramics can be easily manufactured without molding, calcining and sintering processes. Further, by selecting shapes of the base material, various forms of thin plates such as a polygonal shape, a discoid shape, a ring shape and a triangular shape can be easily manufactured. Further, by thermal-spraying the rare earth-containing oxide to a base material with a plurality of holes, a thermal-sprayed thin plate with a plurality of holes can be also manufactured. <P>COPYRIGHT: (C)2012,JPO&INPIT |
